- Electron Microscopy (EM)
- Time-of-Flight Secondary Ion Mass Spectrometry (TOF SIMS)
- X-ray Photoelectron Spectroscopy (XPS)
- Low Energy Ion Scattering (LEIS)
- Digital Optical Microscopy (OM)
Time-of-Flight Secondary Ion Mass Spectrometry (TOF SIMS)
Specification4" version for sample sizes up to 100 mm in diameter8" version for sample sizes up to 200 mm in diameter12" version for sample sizes up to 300 mm in diameterApplicationMulti-purpose SIMS instrument for industry and research. The TOF.SIMS 5 provides detailed elemental and molecular information about surface, thin layers, interfaces of the sample, and gives a full three-dimensional analysis. Its unique design guarantees optimum performance in all fields of SIMS applications.