Большой выбор ионных источников для построения профилей распределения по глубине элементов и их химических состояний как для неорганических, так и органических образцов.
The AXIS Nova may be configured with a standard monoatomic Ar+ ion source, the polyaromatic hydrocarbon (PAH) ion source or the Gas Cluster Ion Source (GCIS) depending on the type of samples to be profiled.
The monatomic Ar+ ion source (Minibeam 4) operates with continuously variable beam energies between 4 keV and 50 eV. The precision ion column incorporates a bend for neutral suppression as well as the ability to operate in floating mode producing high current densities at low ion energies for improved interface resolution and fast etch rates even at low ion acceleration voltage.
The poly-aromatic hydrocarbon ion source (Minibeam 5) is a dual mode ion source, using either coronene (C24H12+) or monatomic Ar+ ions for sputter profiling. Using the ion source in coronene mode allows the depth profiling of organic samples whilst the ability to switch to Ar+ ions retains the capability of successfully profiling inorganic and metallic samples. The coronene is sublimed in a PID controlled oven and ionised by electron impact, analogous to Ar+ mode. The ions are extracted from the source region, accelerated to maximum energy of 20 keV (coronene) or 5 keV (Ar) focussed using standard ion optics. The Minibeam 5 incorporates a Wien velocity filter to select the C24H12+ or C24H12++ ions as required.
The Minibeam 6 is an Ar Gas Cluster Ion Source (GCIS) capable of generating Arn+ clusters consisting of hundreds or even thousands of Ar atoms. As the energy of the ion is shared by all atoms in the cluster the energy per projectile atom, or partition energy, can be as low as a few electron volts such that cluster ions only sputter material from the near-surface region leaving the subsurface layer undisturbed. The use of cluster ions for sputter depth profiling organic materials has lead to successful depth profiles from many different types of modern layer materials such as organic light emitting diodes and organic photovoltaics. Large Ar clusters are formed by isentropic adiabatic cooling of the gas as it expands from high pressure into the vacuum of the source region through a de Laval nozzle. The Ar clusters are ionised by electron impact and accelerated up to a maximum of 20 keV along the ion column. A Wien velocity filter is used to narrow the sampled range of cluster size with the median cluster size varied between Ar500+ to Ar2000+. The Minibeam 6 can also be operated in the standard monoatomic Ar+ mode which is better suited to depth profiling inorganic materials.
All control and status read-backs are displayed in the acquisition software with pre-defined operating conditions provided in a look-up table.