Ionfab 300Plus
Ионно-лучевая система для процессов нанесения и травления.
Ionfab300Plus is a modular System designed for ion beam etching
and deposition. It is used in a wide variety of processes,
particularly in the Semiconductor and Optical Coating Industries
Easy to site, use and maintain
- Through-wall interface options allow the system to be sited in “grey area”
- Ease of access to process chamber with two doors
- Ease of maintenance with door-mounted ion sources
- Compact footprint reduces cleanroom space required
Typical applications and materials:
- IR detectors
- CdHgTe (CMT) etch
- VOx deposition and etch
- Metal contact and track etch
- Cu, Ni, Al…
- Noble metals: Au, Pt, Pd…
- Diffraction gratings
- SiO2 ‘blazed’ etch
- Spintronics and MRAM
- AR and HR coatings for laser bars
- Telecom filters
- III-V photonics etching
- Thin film magnetic hard disk heads (TFMH)
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| Thin film magnetic heads |
Night vision and security equipment |