ToF SIMS
The flexible, high precision sample manipulators as well as the perfect charge compensation allow the analysis of virtually all kinds of samples, making IonTof instruments the most flexible SIMS tools in the market.
Due to the modular design, the instruments can be configured with a selection of optimised ion guns, sample preparation facilities and a variety of special accessories in order to address even the most challenging analytical tasks. The computer control of all instrument functions and parameters ensures ease-of-use and a high level of automation.
ToF SIMS 5
Specification
4" version for sample sizes up to 100 mm in diameter
8" version for sample sizes up to 200 mm in diameter
12" version for sample sizes up to 300 mm in diameter
Application
Multi-purpose SIMS instrument for industry and research.
The TOF.SIMS 5 provides detailed elemental and molecular information about surface, thin layers, interfaces of the sample, and gives a full three-dimensional analysis. Its unique design guarantees optimum performance in all fields of SIMS applications.