HR-MFM
Especially
designed for research, development and quality control of magnetic
storage media and other magnetic material, the hr-MFM is an analytical
and quantitative magnetic imaging system. Its exceptionally high
magnetic resolution of 10 nm or better matches the best results
obtained by SEMPA (Scanning Electron Microscopy with
Polarization Analysis) on disk media.
The hr-MFM features fast mounting of hard disk platters and a coarse
positioning system with a radial accuracy of 100 nm and an
angular accuracy of 0.0002° on the entire disk area. The two
available metrology scanners, one for a scan range of 12 µm × 12 µm and
the other for a scan range of 40 µm × 40 µm, are fully linearized.
The microscope can be operated at ambient temperature as well as in
high vacuum. Its vacuum pumping system includes a turbomolecular pump
and a membrane pump ensuring high-vacuum conditions with easy
maintenance and a pump-down time of less than 10 minutes. The
vibration and acoustic isolation system is electronically controlled.
The different operational modes include a true non-contact mode as well
as the ability to reverse the
tip magnetization for excellent separation of topographic and magnetic
information. NanoScan developed a new proprietary software and control
system with the main focus on user-friendliness and a wide range of
SPM-modes. A fully digital PLL system with high frequency stability was
implemented. The sample can be mounted easily and the
cantilever alignment is completely motorized.
HR-MFM
Especially designed for research, development and quality control of magnetic storage media and other magnetic material, the hr-MFM (high-resolution Magnetic Force Microscope) is an analytical and quantitative magnetic imaging system. Its exceptionally high magnetic resolution of 10 nm or better matches the best results obtained by SEMPA (Scanning Electron Microscopy with Polarization Analysis) on disk media.
The hr-MFM is a key instrument in the improvement of the current hard disk technology and is optimized for research and development departments of the data storage industry. In Research Centers and Universities it is an excellent tool to analyze surface structures and to characterize new magnetic materials and thin film technology, for example magnetic quantum dots and layered nanostructures for mRAM and FeRAM applications.