FEI

Solutions for Enhanced Performance and Analysis Scanning Electron Microscopes (SEM) are used for inspecting topographies of materials with a magnification range that encompasses that of optical microscopy and extends it to the nanoscale. FEI offers a variety of advanced scanning electron microscopes (SEM) to meet customer requirements and application needs.

FEI's market-leading transmission electron microscopes (TEM) feature fully integrated and automated operation for a range of applications requiring ultra-high resolution to sub-Ångström levels. Transmission electron microscopes utilize very thin (0.5 µm or less) samples illuminated by an electron beam. Images are recorded by detecting the electrons that pass though the sample to a system of electromagnetic lenses which focus and enlarge the image on a fluorescent screen, photographic film or digital camera. Magnifications beyond 1,000,000x are attainable with a transmission electron microscope.

FEI's DualBeam™ (FIB/SEM) systems are the preferred solution for 3D microscopy and analysis serving material characterization, industrial failure analysis and process control applications. They are designed to deliver integrated sample preparation and microanalysis below 1nm for high throughput semiconductor and data storage fabs and materials science and life science labs.

Reveal below-the-surface defects in materials and devices. A focused ion beam system (FIB) is a relatively new tool that has a high degree of analogy with a focused electron beam system such as a scanning electron microscope or a transmission electron microscope. In these systems the electron beam is directed towards the sample, and upon interaction it generates signals that are used to create high magnification images of the sample. As the beam is well controlled in size and position and the signals are strong enough to be detected without excessive noise, these kinds of tools are very powerful to analyze samples in great detail over a wide range of magnifications.

The Phenom™ is a high-resolution personal desktop scanning electron microscope (SEM) with an optical camera for never-lost navigation. Its innovative touch-screen user interface and control knob let you quickly produce high-quality electron microscope images with minimal training. Phenom can handle a wide range of samples with minimal preparation and are loaded instantly with our patented low vacuum load-lock technology. Images are saved on a USB memory stick or network storage location for off-line analysis, measurements and distribution.